Electronic Gases including Ne & Xe Market Report CMR 2023

Description

This report covers the electronic gas materials market and supply-chain for these materials used in semiconductor device fabrication. One of the challenges that the gas companies encounter is profitability due to the timing of investments and industry downturns for large installations like Air Separation Units (ASUs) and Semiconductor fabs. In the meantime, new suppliers are emerging in the China market to support the “Made in China” program backed by the government. When these suppliers gain in capability and capacity, their influence could dramatically impact the gas supply chain in the next 3+ years

Featured Press Release on Electronic Gases Market Updates and Report Highlights:

Table of Contents:

1 EXECUTIVE SUMMARY  13
1.1 ELECTRONIC GAS MARKET – HISTORICAL AND 5-YEAR FORECAST 		14
1.2 MARKET DRIVERS FOR THE SPECIALTY GAS MARKET 			15
1.2.1 SPECIALTY GAS MARKET: 5-YEAR SUPPLY & DEMAND			16
1.3 MARKET TRENDS 							17
1.4  TECHNOLOGY TRENDS– DEVICE ROADMAP   				21
1.4.1 TECHNOLOGY TRENDS – DEVICE SEGMENT OPPORTUNITIES			22
1.5 COMPETITIVE LANDSCAPE– ELECTRONIC GAS MARKET SHARE 			23
1.6 SUPPLY CAPACITY AND DEMAND, INVESTMENTS 				24
1.7 EHS AND LOGISTIC ISSUES– GREEN HOUSE GASES FROM LOGIC PRODUCTION 	25
1.8 MARKET ASSESSMENT SUMMARY 						28

2 SCOPE, PURPOSE AND METHODOLOGY  30
2.1 SCOPE 								31
2.2 PURPOSE 								32
2.3 METHODOLOGY 							33
2.4 OVERVIEW OF OTHER TECHCET CMR™ REPORTS 				34

3 SEMICONDUCTOR INDUSTRY MARKET STATUS & OUTLOOK 35
3.1 WORLDWIDE ECONOMY 							36
3.1.1  SEMICONDUCTOR INDUSTRIES TIES TO THE GLOBAL ECONOMY 		38
3.1.2 SEMICONDUCTOR SALES GROWTH					39
3.1.3 TAIWAN MONTHLY SALES TRENDS					40
3.1.4 UNCERTAINTY ABOUNDS ESPECIALLY FOR 2023 - SLOWER TO NEGATIVE 
SEMICONDUCTOR  REVENUE GROWTH EXPECTED					41
3.2 CHIPS SALES BY ELECTRONIC GOODS SEGMENT 				42
3.2.1 SMARTPHONES 							43
3.2.2 PC UNIT SHIPMENTS 						44
3.2.3  SERVERS / IT MARKET						47
3.3 SEMICONDUCTOR FABRICATION GROWTH & EXPANSION 			48
3.3.1 FAB EXPANSION ANNOUNCEMENT SUMMARY				49
3.3.2 WW FAB EXPANSION DRIVING GROWTH 					51
3.3.3 EQUIPMENT SPENDING TRENDS						52
3.3.4 TECHNOLOGY ROADMAPS						53
3.3.5 FAB INVESTMENT ASSESSMENT						54
3.4 POLICY & TRADE TRENDS AND IMPACT 					55
3.5 SEMICONDUCTOR MATERIALS OVERVIEW					56
3.5.1 COULD MATERIALS CAPACITY LIMIT CHIP PRODUCTION SCHEDULES?	57
3.5.2 LOGISTICS ISSUES EASED DOWN 					58
3.5.3 TECHCET WAFER STARTS FORECAST THROUGH 2027			59
3.5.4 TECHCET’S MATERIAL FORECAST					60

4  ELECTRONIC GASES MARKET TRENDS  61
4.1 MARKET TRENDS DRIVING THE ELECTRONIC GAS BUSINESS  	 	 	62
4.2 SUPPLY CAPACITY AND DEMAND, INVESTMENTS 		 	 	64
4.2.1 WF6 DEMAND DRIVERS				 	 	67
4.2.2 WF6 MARKET DEMAND				 	 	 	68
4.2.3 WF6 MARKET DEMAND– MO ALD IP FILING		 	 	70
4.2.4 WF6 MARKET DEMAND				 	 	 	71
4.3 TECHNICAL DRIVERS / MATERIAL CHANGES AND TRANSITIONS 	 	72
4.3.1 GENERAL TREND LAST DECADE GOING FROM PVD & LPCVD TO PECVD	73
4.3.2 MARKET TRENDS BY DEVICE TYPE AND NODE – ADVANCED DEVICES	 	74
4.3.3 MARKET TRENDS– ADVANCED LOGIC			 	 	75
4.3.4 MARKET TRENDS– WAFER STARTS DRAM			 	 	79
4.3.5 MARKET TRENDS– WAFER STARTS NAND			 	 	81
4.3.6  DEPOSITION PROCESS BY DEVICE TYPE AND MATERIAL– AN OVERVIEW  	84
4.3.7  ETCH PROCESS BY DEVICE TYPE– ATOMIC LAYER ETCHING ALE	 	86
4.3.8 SUMMARY OF TECHNICAL TRENDS AND OPPORTUNITIES		 	92
4.4 REGIONAL TRENDS				 	 	 	93
4.4.1 REGIONAL TRENDS – LINDE			 	 	 	94
4.4.2 REGIONAL TRENDS– AIR LIQUIDE		 	 		95
4.4.3 REGIONAL TRENDS– AIR PRODUCTS		 	 		96
4.4.5 REGIONAL TRENDS– TAIYO NIPPON SANO		 	 	97
4.4.6 REGIONAL TRENDS– KOREA			 	 	 	98
4.4.7 REGIONAL TRENDS– JAPAN			 	 	 	99
4.4.8 REGIONAL TRENDS– JAPAN & KOREA			 		100
4.3.15 REGIONAL TRENDS– CHINA			 	  	 	101
4.4.9 REGIONAL TRENDS – RUSSIA			 	 	 	102
4.4.10 REGIONAL TRENDS– USA			 	 	 	103
4.5 GENERAL COMMENTS ON SPECIFICATIONS AND PURITY  		 	106
4.6 ELECTRONIC GAS SUPPLY CHAIN RISK FACTORS 		 	 	107
4.6.1 GEOPOLITICAL RISKS				 	 	108
4.6.2 RUSSIA RISKS				 	 	 	109
4.6.3 SUPPLY CHAIN RISKS– RAW MATERIAL PRICING 		 	 	110
4.6.4 LOGISTICS				 	 	 	 	111
4.7 MARKET TRENDS ASSESSMENT 			 	 	 	112

5 EHS AND SUSTAINABILITY ISSUES  113
5.1 EHS AND LOGISTIC ISSUES– GREEN HOUSE GASES FROM SEMICONDUCTOR 
PRODUCTION 								114
5.1.2 EHS AND LOGISTIC ISSUES– GREEN HOUSE GASES FROM SEMICONDUCTOR 
PRODUCTION, CONTINUED							115
5.2 EHS AND LOGISTICS ISSUES 						116
5.3 EHS AND LOGISTIC ISSUE – GREEN HOUSE GASES FROM SEMICONDUCTOR 
PRODUCTION 								117
5.4 EHS AND LOGISTIC ISSUES– GREEN HOUSE GASES FROM AIR GASES (NEON)	118
5.4.1 ASU ENERGY CONSUMPTION - GHG EMISSIONS				119
5.4.2  ASU ENERGY CONSUMPTION - GHG EMISSIONS				120
5.4.3 CARBON FOOTPRINT OF SHIFTING NEON SUPPLY FROM UKRAINE TO CHINA	121
5.4.4 CARBON FOOTPRINT OF NEON PRODUCTION				122
5.4.5 CARBON FOOTPRINT OF NEON SHIPPING IN GAS ISO CONTAINER		123
5.4.6  DRAFT CALCULATION TRANSPORT: CHINA VS UKRAINE			124
5.5 SUSTAINABLE SEMICONDUCTOR PROCESSES AND MANUFACTURING 
TECHNOLOGIES 								125
5.6 HELIUM – SUSTAINABLE PRODUCTION – GREEN HELIUM 			126
5.7 HELIUM – SUSTAINABLE PRODUCTION – GREEN HELIUM 			127
5.8  NF3 REPLACEMENT: F2 GAS 						128
5.8.1 FLUORINATED GAS REGULATIONS					129
5.8.2 FLUORINATED GAS REGULATIONS, CONTINUED				130
5.8.3 LINDE F-GAS INSTALLATION						131
5.8.4 ENVIRONMENT REGULATION RISK– IMPLEMENTED TREATIES AND PROTOCOLS	132


6 ELECTRONIC GASES MARKET STATISTICS & FORECASTS  133
6.1 ELECTRONIC GAS MARKET– HISTORICAL AND 5-YEAR FORECAST 		134
6.1.1 INDUSTRIAL GAS MARKET 						135
6.1.2 ELECTRONIC GAS MA							136
6.1.3 SUPPLIER LIST, FINANCIALS AND PROFILES				137
6.1.4 MARKET DRIVERS FOR THE SPECIALTY GAS MARKET			138
6.2 SPECIALTY GAS MARKET: 5-YEAR SUPPLY & DEMAND RKET SHARE		139
6.2.1 HE 5-YEAR SUPPLY & DEMAND						140	
6.2.1 HE 5-YEAR SUPPLY & DEMAND, CONTINUED				141
6.2.2 NE 5-YEAR SUPPLY & DEMAND						142
6.2.3 NEON								143
6.2.4 XE 5-YEAR SUPPLY & DEMAND						144
6.2.5 NF3 5-YEAR SUPPLY & DEMAND					146
6.2.6 TUNGSTEN HEXAFLUORIDE 5-YEAR SUPPLY & DEMAND			147
6.3 M&A ACTIVITIES 							148
6.4 NEW PLANTS 								149
6.4.1 NEW PLANTS, LINDE EXPANSIONS 2023					152
6.4.2 NEW PLANTS, AIR LIQUIDE EXPANSIONS 2022/2023			153
6.4.3 NIHON SUO HOLDING CO., LTD. TO INCREASE DIBORANE CAPACITY	154
6.5 SUPPLIER PLANT CLOSURES 						155
6.5.1 NEW ENTRANTS– SK MATERIALS, SHOWA DENKO SEEK JOINT ENTRY INTO 
US SEMICONDUCTOR GAS MARKET						156
6.5.2 NEW ENTRANTS– RESONAC						157
6.5.3 NEW ENTRANTS– NEON, CHINA						158
6.6 PRICING TRENDS 							159
6.7 GAS SUPPLY ASSESSMENT 						160

7  SUB TIER MATERIAL SUPPLY CHAIN  161
7.1  SALES CHANNELS 							162 
7.2  LOGISTICS REQUIREMENTS  						163
7.2.1 SUB-TIER SUPPLY-CHAIN: TUNGSTEN DISRUPTIONS			164
7.3 SUB-TIER SUPPLY-CHAIN M&A ACTIVITY 					166
7.4 SUB-TIER SUPPLY-CHAIN EHS AND LOGISTICS ISSUES 			167
7.5 SUB-TIER SUPPLY-CHAIN PRICING TRENDS 				168
7.6 SUB-TIER SUPPLY-CHAIN TECHCET ANALYST ASSESSMENT 			169
	
8  SUPPLIER PROFILES  170
ADEKA CORPORATION 
AIR LIQUIDE 
AZMAX CO., LTD 
DNF CO., LTD 
ENTEGRIS 
...and 20+ more

9  APPENDIX 
9.1 GASES USED BY MULTIPLE INDUSTRIES 					288
9.1.1 SPECIALTY GAS INDUSTRY MATRIX					289
9.1.2 GASES USED FOR SEMICONDUCTOR DEVICE MANUFACTURING			290
9.1.3 GASES USED IN THE DISPLAY INDUSTRY				291
9.2 SUPPLIER LISTING BY GAS TYPE 					294
9.2.1 HYDRIDES								295
9.2.2 SILICON PRECURSORS (SILANES)					296
9.2.3 ETCHANTS/CHAMBER CLEAN						297
9.2.4 DEPOSITION/MISC							298
9.2.5 BULK GASES							299
9.3 ETCH GAS ROADMAPS 							300
9.3.1 ETCH ROADMAPS 1 OF 3 						301
9.3.2 ETCH ROADMAPS 2 OF 3 						302
9.3.3 ETCH ROADMAPS 3 OF 3 						303


LIST OF FIGURES
FIGURE 1: ELECTRONIC GAS MARKET						14
FIGURE 2: ELECTRONIC GAS MARKET SEGMENTATION				15
FIGURE 3:  TECHCET WAFER START FORECAST BY NODE				17
FIGURE 4: TECHNOLOGY ROADMAP DEVICES					21
FIGURE 5: TOTAL ELECTRONIC GAS MARKET SHARE 2021, US$6,3 BILLION	23
FIGURE 6: AIR GAS BOILING POINT						25
FIGURE 7: COMPARISON OF CO2 EMISSIONS FROM VARIOUS 
TRANSPORTATION MODES							26
FIGURE 8: OCEAN CONTAINER PRICE INDEX - JULY ‘20 TO MARCH ‘23 		27
FIGURE 9: GLOBAL ECONOMY AND THE ELECTRONICS SUPPLY CHAIN (2022)	38
FIGURE 10: WORLDWIDE SEMICONDUCTOR SALES 				39
FIGURE 11: TECHCET’S TAIWAN SEMICONDUCTOR INDUSTRY INDEX (TTSI)*	40
FIGURE 12: 2023 SEMICONDUCTOR INDUSTRY REVENUE GROWTH FORECASTS	41
FIGURE 13: 2022 SEMICONDUCTOR CHIP APPLICATIONS				42
FIGURE 14: MOBILE PHONE SHIPMENTS WW ESTIMATES 				43
FIGURE 15: WORLDWIDE PC AND TABLET FORECAST				44
FIGURE 16: ELECTRIFICATION TREND BY WORLD REGION 			45
FIGURE 17: SEMICONDUCTOR AUTOMOTIVE PRODUCTION				46
FIGURE 18: TSMC PHOENIX INVESTMENT ESTIMATED WILL BE US $40 B		48
FIGURE 19: CHIP EXPANSIONS 2022-2027 US$366 B				49
FIGURE 20: SEMICONDUCTOR CHIP MANUFACTURING REGIONS OF THE WORLD	51
FIGURE 21: GLOBAL TOTAL EQUIPMENT SPENDING BY SEGMENT (US$ B)		52
FIGURE 22: OVERVIEW OF ADVANCED LOGIC DEVICE TECHNOLOGY ROADMAP	53
FIGURE 23: INTEL OHIO PLANT SITE FEB. 2023 AND ARTIST RENDERING 
(ON BOTTOM)								54
FIGURE 24: EUROPE CHIP EXPANSION UPSIDE					57
FIGURE 25: PORT OF LA							58
FIGURE 26:  TECHCET WAFER START FORECAST BY NODE SEGMENTS**		59
FIGURE 27:  GLOBAL SEMICONDUCTOR MATERIALS OUTLOOK			60
FIGURE 28: 2D PHASE OF BORON AS POSSIBLE FUTURE TRANSISTOR CHANNEL	66
FIGURE 29: 3DNAND MARKET SHARE 2022					67
FIGURE 30: 3DNAND STRUCTURE						68
FIGURE 31: MO PRECURSORS						69
FIGURE 32: PATENT FAMILIES FILED FOR MOLYBDENUM ALD IN 
THE MEMORY SPACE							70
FIGURE 33:WAFER START FORECAST SHOWING TWO TIMINGSCENARIOS WHERE MO 
COULD BE INTRODUCED (MILLIONS OF 200 MM EQUIVALENT / YEAR)		71
FIGURE 34: 3D DEVICE ARCHITECTURES					73
FIGURE 35: FORECASTS – WAFER STARTS 2021 TO 2027 			74
FIGURE 36: FORECASTS – WAFER STARTS LOGIC 300 MM 			75
FIGURE 37: SAMSUNG START 3 NM PILOT RAMP USING GAA-FET TECHNOLOGY 
JUNE 2022								76
FIGURE 38: IMEC 2022 LOGIC ROADMAP					77
FIGURE 39: APPLIED MATERIALS CENTURA PATTERN SHAPING CLUSTER		78
FIGURE 40: FORECASTS – WAFER STARTS DRAM 300 MM				79
FIGURE 41: IP FILING IN THE FIELD OF 3DRAM IS ACCELERATING		80
FIGURE 42: FORECASTS – WAFER STARTS NAND 300 MM				81
FIGURE 43:  PATHWAYS FOR CONTINUED 3D NAND SCALING			82
FIGURE 44: 3DNAND SCALING FROM 1 STACK TO 4 STACKS			83
FIGURE 45: SELECTIVE W LOWERS RESISTANCE				85
FIGURE 46: FINFET/GAA TRANSITION					86
FIGURE 47: SELECTIVITY IMPROVEMENT WITH ALE 				87
FIGURE 48: ALD AND ALE ROADMAPS OF INTEL, TSMC AND SAMSUNG		88
FIGURE 49: DEP - ALE STI FILL AND RECESS ETCH				90
FIGURE 50: PLASMA AND THERMAL ALE PROCESSES				91
FIGURE 51: AIR LIQUIDE FINANCIALS (ANNUAL REPORT 2022 PENDING)		95
FIGURE 52: KOREA 2021 NEON IMPORTS					98
FIGURE 53: RESONAC BUSINESS SEGMENT REVENUE 2022			99
FIGURE 54: TOTAL HELIUM PRODUCTION 160 MILLION M3			102
FIGURE 55: FLUORSPAR PRICE IN US 2014-2022				110
FIGURE 56: OCEAN CONTAINER PRICE INDEX - JULY ‘20 TO MARCH ‘23 		111
FIGURE 57: CO2 EMISSIONS CONTRIBUTIONS WITHIN A CHIP FAB		114
FIGURE 58:  GLOBAL WARMING IMPACT FROM VARIOUS PROCESS GASES   	115
FIGURE 59: TOTAL EMISSIONS AND ENERGY USE PROJECTION PER LOGIC NODE	116
FIGURE 60: CO2EQ OUTPUT FROM ETCH GASES 				117
FIGURE 61: AIR SEPARATION UNIT FLOW CHART				118
FIGURE 62: AIR GAS BOILING POINT					119
FIGURE 63: CARBON GENERATION FROM AIR SEPARATION PROCESSES 		120
FIGURE 64: COMPARISON OF CO2 EMISSIONS FROM VARIOUS 
TRANSPORTATION MODES 							123
FIGURE 65: F2 AND NF3 ACTIVATION					128
FIGURE 66: ELECTRONIC GAS MARKET					134
FIGURE 67: TOTAL INDUSTRIAL GAS MARKET 2021, US$97 BILLION		135
FIGURE 68: TOTAL ELECTRONIC GAS MARKET 2021, US$6,3 BILLION		136
FIGURE 69: ELECTRONIC GAS MARKET SEGMENTATION				138
FIGURE 70: HE WW SUPPLY AND DEMAND					140
FIGURE 71: 2027 HELIUM SUPPLY						141
FIGURE 72: TOTAL NEON DEMAND VS. SUPPLY					142
FIGURE 73: KOREA 2021 NEON IMPORTS					143
FIGURE 74: TOTAL XENON DEMAND VS. SUPPLY (MILLION LITERS/YR)		144
FIGURE 75: TOTAL KRYPTON DEMAND VS. SUPPLY (MILLION LITERS/YR)		145
FIGURE 76: NF3  SUPPLY/DEMAND						146
FIGURE 77: AWF6 FORECAST						147
FIGURE 78: HARDMASK SCHEMATIC						154
FIGURE 79: LATEST SITUATION MAP IN UKRAINE, SHOWING TAKEN MAURIUPOL 
BUT ODESSA STILL FREE							155
FIGURE 80: RESONAC BUSINESS SEGMENT REVENUE 2022			157
FIGURE 81: RARE GAS PRICE ESCALATION					159
FIGURE 65: F2 AND NF3 ACTIVATION					128
FIGURE 66: ELECTRONIC GAS MARKET					134
FIGURE 67: TOTAL INDUSTRIAL GAS MARKET 2021, US$97 BILLION		135
FIGURE 68: TOTAL ELECTRONIC GAS MARKET 2021, US$6,3 BILLION		136
FIGURE 69: ELECTRONIC GAS MARKET SEGMENTATION				138
FIGURE 70: HE WW SUPPLY AND DEMAND					140
FIGURE 71: 2027 HELIUM SUPPLY						141
FIGURE 72: TOTAL NEON DEMAND VS. SUPPLY					142
FIGURE 73: KOREA 2021 NEON IMPORTS					143
FIGURE 74: TOTAL XENON DEMAND VS. SUPPLY (MILLION LITERS/YR)		144
FIGURE 75: TOTAL KRYPTON DEMAND VS. SUPPLY (MILLION LITERS/YR)		145
FIGURE 76: NF3  SUPPLY/DEMAND						146
FIGURE 77: AWF6 FORECAST						147
FIGURE 78: HARDMASK SCHEMATIC						154
FIGURE 79: LATEST SITUATION MAP IN UKRAINE, SHOWING TAKEN MAURIUPOL 
BUT ODESSA STILL FREE							155
FIGURE 80: RESONAC BUSINESS SEGMENT REVENUE 2022			157
FIGURE 81: RARE GAS PRICE ESCALATION					159
FIGURE 82: HE MATERIALS SUPPLIER TIER STRUCTURE 			162
FIGURE 83: TUNGSTEN USE BY INDUSTRY (TECHCET ESTIMATE)			165
FIGURE 84: ELECTRONIC SPECIALTY GASES					177
FIGURE 85: BULK GASES							177

LIST OF TABLES
TABLE 1: SPECIALTY AND BULK GAS REVENUE 2022, 2027			14
TABLE 2: ELECTRONIC GAS MARKET GROWTH RATES BY END MARKET		15
TABLE 3: 5-YEAR SPECIALTY GAS SUPPLY & DEMAND				16
TABLE 4: GAS TRENDS AND OPPORTUNITIES BY DEVICE TYPE & PROCESS 
TECHNOLOGY								22
TABLE 5: GLOBAL GDP AND SEMICONDUCTOR REVENUES*				36
TABLE 6: IMF ECONOMIC OUTLOOK* 						37
TABLE 7: DATA CENTER SYSTEMS AND COMMUNICATION SERVICES MARKET 
SPENDING 2022								47
TABLE 8: OVERVIEW OF DEPOSITION PROCESSES BY DEVICE TYPE AND MATERIAL	84
TABLE 9: ETCH GASES SUMMARY TABLE					91
TABLE 10: GAS TRENDS AND OPPORTUNITIES BY DEVICE TYPE			92
TABLE 11: LINDE FINANCIALS AND REGIONAL SALES				94
TABLE 12: AIR PRODUCTS REGIONAL FINANCIALS				96
TABLE 13: TAIYO NIPPON SANSO REGIONAL FINANCIALS			97
TABLE 14: ESTIMATED SUPPLY CHAIN SUPPLIER RANKING			104
TABLE 15: REGIONAL SUMMARY OF GAS MARKET				105
TABLE 16: CO2 EMISSIONS PER TONS SHIPPED BY OCEAN, TRUCK OR RAIL	124 
TABLE 17: GAS GWP AND ATMOSPHERIC LIFETIME				128
TABLE 18: ELECTRONIC GAS MARKET SIZE AND GROWTH				134
TABLE 19: TOTAL REVENUE 2022 COMPARED TO 2021 OF MAJOR GAS COMPANIES 
AND GAS SUPPLIERS							137
TABLE 20: ELECTRONIC GAS MARKET GROWTH RATES BY END MARKET		138
TABLE 21: 5-YEAR SPECIALTY GAS SUPPLY & DEMAND				139
TABLE 22: M&A ACTIVITIES						148
TABLE 23: SPECIALTY GAS INDUSTRY MATRIX					173
TABLE 24: GASES USED IN FPD MANUFACTURING 				176
TABLE 25: HYDRIDE GAS SUPPLIERS						179
TABLE 26: SILICON PRECURSOR SUPPLIERS					180
TABLE 27: ETCHANT GAS SUPPLIERS						181
TABLE 28: DEPOSITION/MISC. GAS SUPPLIERS				182
TABLE 29: BULK GAS SUPPLIERS						183
TABLE 30: ETCH ROADMAPS							185
TABLE 31: ETCH ROADMAPS							186
TABLE 32: ETCH ROADMAPS							187